Introduction to Experiment

• P-type, (100) CZ Boron doped 10-20 ?/cm

• Clean: SPM/HF/HPM

• Wet oxidation at 950 C for 24 min, Tox ~ 110 nm

• Two chemistries: HF:H2O (1:50) and HF:H2SO4:H2O (1:0.25:30)

• Thermally grown and native oxides stripped by chemistries, measured with AFM & SE

Previous slide

Next slide

Back to first slide

View graphic version