Joint Project on Gas Phase Cleaning ProcessesUniversity of Arizona/Stanford

Kinetics

Transport

Chemical Bonding

Study of

Silicon Dioxide

Etching using Gas Phase

HF/Vapor Mixtures

ATR-FTIR

Ellipsometry

Muscat/University of Arizona

Helms/ Chiarello & Hanson/Baer /Stanford

Ellipsometry

Laser

Absorption

Si

SiO2

O

H

H

F

H

O

H

H

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