Mechanisms Influencing Chemical Removal
November 20, 1997
NSF/SRC Center for Environmentally Benign
Semiconductor Manufacturing
Smooth Wafer Surfaces
Carryover of chemical
Surface phenomena
Adsorption/Desorption
Surface Chemistry
Diffusion from surface
Bulk fluid transport
Patterned Wafer Surfaces
All smooth wafer considerations
Effects of surface roughness
Capillary effects
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