Deposition Processes
Spin-on
- used for most organic polymers and aerogels
- anisotropic properties
- uses solvents: environmental issues
- worker safety
- disposal cost
Plasma-Enhanced Chemical Vapor Deposition (PECVD)
- operates at lower T than CVD
- compatible with current processing and equipment
- in vacuo transfer/multichamber processing
- dry cleaning
- conformal coatings
- solventless
- Issue: dangling bond concentration