Monomer Selection
Initial choice: Hexafluoropropylene oxide (HFPO)
- Thermally decomposes into CF2 and stable carbonyl (Knickelbein et. al., 1985)
- Plasma films observed to be similar to thermal films
- Oxygen tied up in carbonyl (< 2% detected in films)
- Initial work with HFPO by Savage et. al. (1993) reported interesting results
- Global Warming Potential (GWP) ? low
- Problem: hexafluoroacetone (HFA) impurity (< 0.3 wt%)