Capabilities and protocol
Infrared spectrometry of H-terminated Si
- Mattson RS-10000 FTIR w/purged external optics
- Several geometries available, Brewster-angle trans-mission chosen for simplicity and available spectral range
- Si-H stretching band at 2083 cm-1 observed
Piranha clean, NH4F etch, expose to H2O under various conditions
- still (as control)
- stirred (to investigate postulated depletion layer)
- Ar sparge (to purge water of dissolved oxygen)