Thrust C: Factory Integration
Current Emphasis on Water and Energy
Present Focus Areas
- New ESH Benign Water Purification Processes
2. Use Reduction: Novel Rinse Processes
3. Water Recycling and Reuse
4. New Processes for Wastewater and Discharge Treatment
Thrust C Focus Areas
1. New Processes: ESH Benign Purification and Waste Treatment Processes:
Low-energy and low-waste purification processes
2. Use Reduction: Water Conservation Through Novel Rinse Processes:
Fundamentals of chemical carry over steps (pull out, transfer and immersion) and effect on rinse water usage and quality
Effective low-water post-CMP rinsing
Rinse process simulator
3. Water Reuse and Recycle:
Recycle process simulator
Novel CMP recycle strategy
Integrated UPW rinse and recycle
Rapid response, in-situ, on-line sensors for measurement of contaminants in recycle systems
4. Abatement and Discharge Control:
New biochemical processes for wastewater treatment in fabs