vti_encoding:SR|utf8-nl vti_title:SR|Berkeley HDP Oxide Etch Tool System (Lam 9000 series tool, donated 3/97) vti_filesize:IR|1214 vti_backlinkinfo:VX|erc_oct_9/berkeley/erctelecon/sld003.htm erc_oct_9/berkeley/erctelecon/sld001.htm s.htm seminars_old.htm erc_oct_9/berkeley/erctelecon/sld002.htm vti_extenderversion:SR|4.0.2.2717 vti_timelastmodified:TR|09 Oct 1997 12:10:40 -0600 vti_cacheddtm:TX|09 Oct 1997 07:00:00 -0000 vti_cachedlinkinfo:VX|H|sld001.htm H|sld001.htm H|sld002.htm H|sld003.htm H|ERCTelecon.ppt H|MAILTO:webmaster@erc.arizona.edu H|http://www.erc.arizona.edu vti_cachedsvcrellinks:VX|FHUS|Research/members/Teleseminars/1997/October/9/berkeley/ERCTelecon/sld001.htm FHUS|Research/members/Teleseminars/1997/October/9/berkeley/ERCTelecon/sld001.htm FHUS|Research/members/Teleseminars/1997/October/9/berkeley/ERCTelecon/sld002.htm FHUS|Research/members/Teleseminars/1997/October/9/berkeley/ERCTelecon/sld003.htm FHUS|Research/members/Teleseminars/1997/October/9/berkeley/ERCTelecon/ERCTelecon.ppt NHUS|MAILTO:webmaster@erc.arizona.edu WHHS|index.htm vti_cachedtitle:SR|Berkeley HDP Oxide Etch Tool System (Lam 9000 series tool, donated 3/97) vti_cachedbodystyle:SR| vti_cachedhasbots:BR|false vti_cachedhastheme:BR|false vti_cachedhasborder:BR|false vti_metatags:VR|GENERATOR Microsoft\\ Internet\\ Assistant\\ for\\ PowerPoint\\ 97 vti_generator:SR|Microsoft Internet Assistant for PowerPoint 97