Berkeley Experimental Program
Current Status:
- Etch Tool 100% Functional
- Designing Langmuir Probe
- Installing OES and Chamber QMS Systems
Future Work:
- Study PFC decomposition in the plasma chamber via QMS, Langmuir probe, and optical diagnostics.
- Install QMS in downstream exhaust to study PFC reformation and thus PFC behavior in overall system
- Evaluation of POU plasma abatement apparatus
- Detailed comparison of model predictions to measurement