CF4 Reaction Set
|
Plasma Species |
C, F, CF, F2, CF2, CF3, CF4 |
|
C+, F+, CF+, CF2+, CF3+ and e-, F- |
Ionization |
Elastic Scattering |
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|
1. |
e + C ---> C+ + 2e |
26. |
e + C ---> e + C |
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|
2. |
e + F ---> F+ + 2e |
27. |
e + F ---> e + F |
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|
3. |
e + CF ---> CF+ + 2e |
28. |
e + CF ---> e + CF |
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|
4. |
e + CF2 ---> CF2+ + 2e |
29. |
e + CF2 ---> e + CF2 |
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|
5. |
e + CF3 ---> CF3+ + 2e |
30. |
e + CF3 ---> e + CF3 |
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Dissociative Ionization |
31. |
e + CF4 ---> e + CF4 |
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|
6. |
e + CF2 ---> CF+ + F + 2e |
Neutral - Neutral |
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|
7. |
e + CF3 ---> CF+ + 2F + 2e |
32. |
CF + F ---> CF2 |
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|
8. |
e + CF3 ---> CF2+ + F + 2e |
33. |
CF2 + F ---> CF3 |
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|
9. |
e + CF4 ---> CF+ + 3F + 2e |
34. |
CF3 + F ---> CF4 |
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|
10. |
e + CF4 ---> CF2+ + 2F + 2e |
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|
11. |
e + CF4 ---> CF3+ + F + 2e |
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Dissociation |
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|
12. |
e + F2 ---> 2F + e |
|
Heterogeneous Reactions |
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|
13. |
e + CF ---> C + F + e |
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|
14. |
e + CF2 ---> CF + F + e |
Adsorption |
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|
15. |
e + CF3 ---> CF + 2F + e |
35. |
F + site ---> Fads |
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|
16. |
e + CF3 ---> CF2 + F + e |
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|
17. |
e + CF4 ---> CF + 3F + e |
Desorption |
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|
18. |
e + CF4 ---> CF2 + 2F + e |
36. |
C + Fads ---> CF + site |
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|
19. |
e + CF4 ---> CF3 + F + e |
37. |
F + Fads ---> F2 + site |
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Dissociative Attachment |
38. |
CF + Fads ---> CF2 + site |
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|
20. |
e + CF4 ---> CF3 + F- |
39. |
CF2 + Fads ---> CF3 + site |
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|
21. |
e + F2 ---> F + F- |
40. |
CF3 + Fads ---> CF4 + site |
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Neutralization |
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|
22. |
F+ + F- ---> 2F |
* No deposition reactions. |
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|
23. |
CF+ + F- ---> CF + F |
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24. |
CF2+ + F- ---> CF2 + F |
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25. |
CF3+ + F- ---> CF3 + F |
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*
Bonham, R. A., "Electron Impact Cross Section Data for Carbon Tetraflouride",JJAP, vol. 33 (1994).