Recent Work
Completed Etch Viability tests for initial list of chemistries, including several new IFC chemistries.
Chamber Clean Testing: Evaluated TFAA as alternative chemistry with Air Products (will be presented 10/21 at AVS Conference)
Etch Testing: Evaluated HFC and IFC Chemistries in HDP etch tool at Motorola’s APRDL (will be presented 10/13 at Semicon Southwest)