The Influence of Tank Volume on the Effectiveness of Overflow Rinse Processes
Overview
Motivation
Factors Influencing Rinse
PPT Slide
Integrated Conductivity and Carryover
Experimental Results and the CSTR Model
Interpretation of Results
Dynaflow performance Super Q chemistry, bare wafers
Performance comparison Super Q chemistry, oxide wafers
Surface phenomena
Email: hebda@erc.arizona.edu