PPT Slide
- Cleanliness Detection Options
- ON-LINE
- Resistivity in the Rinse Tank
- Easy; unobtrusive; unreliable?
- OFF-LINE
- Particle Counts on Wafer Surface
- Time-consuming; can only be performed on dry wafers
- Elemental Analysis of Wafer Surface
- Even more time-consuming; dry wafers
- Device Characteristics Testing
- Cannot be performed after each step, only at end