PPT Slide

Mechanisms of Rinsing

Bulk resistivity measurements

-- Industry metric

In situ trench experiments -- Dan Seif

Microprobe carryover/boundary

layer experiments -- Karla Romero

Mechanisms to consider

• Diffusion from carryover

• Convection

• Desorption from surface

• Trench phenomena (capillary action, temperature variations, et. al.)

• Surface reactions (etchants)

Modeling of all pieces -- Andy Hebda

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