PPT Slide
- All experiments carried out in production tool, Santa Clara Plastics 9400 AAT.
- Wafer boats constructed of quartz and contained either all bare or all oxide-coated wafers.
- Rinse baths monitored with resistivity probes and resistivity recorded on auxiliary computer.
- Rinse water on continuously before wafers placed in baths to assure high starting resistivity.
- Rinse water resistivity monitored from wafer immersion until resistivity returned to starting value. (Typically ~16 - 17 Mohm)