PPT Slide
- 20 gallons of water / rinse could be saved on bare wafer post HF rinse (1 minute rinse time reduction)
- Comparison of rinse tanks for post HF and post Super Q rinses of oxide coated wafers -- Dynaflow tank rinsed more efficiently; water savings not clear -- not just ideal mixing model
- Oxide wafer results raise questions regarding the role of the surface in the rinse -- experiments will determine the answers