PPT Slide
Engineering Research Center for Environmentally Benign Semiconductor Manufacturing
Theoretical Equations - Fluid Transport
Convection/Diffusion Equation in 2-D (x,y)
- Rate of desorption is a function of y and x
Convection/Diffusion Equation in 2-D (y,z)
- Diffusion coefficient is a function of position
Nernst-Hartley equation for Diffusion of Binary Electrolytes
Do = D for ideal solution
gca = mean activity coefficient
cca = conc. of both cation and anion