PPT Slide
Engineering Research Center for Environmentally Benign Semiconductor Manufacturing
H2SO4 Solution Characteristics
Solution conductivities may vary by more than 6
Max s ? 1.1 x 10-2 S/cm (40% H2SO4 at 115° C)
Min s ? 5.5 x 10-8 S/cm (UPW at room temp)
Darling, H.E., J. of Chem. and Eng. Data, July 1964
Sulfuric acid is “stickier” than
most process acids. Desorption
rate must be accounted for.
Lee, K.T. and Raghavan, S., unpublished