Experimental: De-oxygenated HF
- 6” p-type Si (100), r ? 20 ?-cm
- Surface prep:
2 min. air-saturated .5 wt.% HF
4 min. Piranha (4:1 H2SO4:H2O2 at 90°C)
2 min. DI rinse
- Measured in air-saturated or Ar-sparged .5 wt.% HF
- Ar-sparging preformed for 1 hr. using grade 5.0 Ar
- Cu spikes performed using solution of 10-6 wt. fraction Cu in 3% HNO3