Table of Contents
Low Water Rinsing of Ionic Contaminants After Copper CMP
Subtask # C-2-3
New Project: started Q4, 1997
PPT Slide
PPT Slide
Determining the Bottleneck
Experimental Cell Used in QCM Technique
Experimental Procedure
Adsorption Results
Desorption Results
Project Highlights
Future Plans
|
Author: Heather Dunlop
|