PPT Slide
Copper Deposition
Planarization
Cu+2
Si Wafer
Si Wafer
Cu
Cu
Si Wafer
Cu
SiO2
SiO2
SiO2
Pads
Pads
High Concentration
Need for Investigating High Cu+2 Concentration Desorption
Concentration of Cu+2 in the water in the region between the pads and oxide layer is very high after Copper CMP
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