PPT Slide
ESH Impact:
- Increased water recycling is a critical requirement in future fabs.
- This technology will facilitate low-risk and low-cost water recycling.
Method of Approach:
- Part 1: Data base on process module fundamentals.
- Part 2: Development of the simulation theory and computational codes.
- Part 3: Application and validation.
- Simulating the fundamentals of UPW systems with and without recycle (Design for Environment tool).
- Utilizing the simulator to understand the dynamics of impurity distribution.
- Utilizing the simulator to develop novel recycle strategies and configurations.
- Integrated rinse and recycle simulation and optimization
- Metrology and control tools and techniques for advanced future UPW systems.