PPT Slide
Motivations
Silicon in Fluoride Solutions
FTIR Spectra for H-Si
Deuterium Labeling to Follow Silicon Etching by FTIR
Step-flow Etching of Si(111)
Dependence of Si(111) Etching
D/H Exchange of Si(100)
Dependence on O2
Dependence on pH
Exchange in BOE
Dependence on HCl
Etching and Oxidation in H2O
Conclusion
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