Motivations
To Study Silicon Etching Mechanism
OH-, O2, F-, HF-, NH4+, ?
To Probe Surface Stability in Aqueous Solutions
(1) Hinds et al, low pH etch for smooth H-Si(100)
(2) Morita, "ideal" H-Si(100)
(3) Can ideal H-Si(100) ever be formed from wet etch?