ESH Integration with Technology Development Cycle
Company Research ... Process Development
Process too close to manufacturing for major change
Design for ESH -- identify and address ESH consequences of new chemistries
After Material Courtesy of J. Jewett, Intel
- For some technologies, it is appropriate to begin integration of DFESH much earlier into the development cycle than the supplier R&D or equipment selection stage, e.g., development of new etch technologies or other technologies where the choice of chemistry has a fundamental impact on both the process and potential ESH issues.