Post-CMP Cleaning
Experimental Equipment (IPEC Planar Avanti 9000)
PPT Slide
Experimental Approach
Experimental Limitations
Experimental Parameters
Sample Results
DOE Results (I)
DOE Results (II) (significant effects on the actual responses)
Summary of Results
Particle Adhesion
Adhesion Forces
Adhesion Forces in Solution
Adhesion Calculations
Model of Brush
Particle Removal By Shear
Shear-Based Removal
Conclusions: Brush Dynamics
Acknowledgment
Email: steve.beaudoin@asu.edu