Experimental Parameters
Brush scrubbing section
- number of brush cycles: High = 4, Low = 1
- brush pressure: High = 3.5 psi, Low = 1 psi
- brush speed: High = 500 rpm, Low = 200 rpm
SRD section
- number of cycles: High = 4, Low = 1
- wafer speed: High = 1000 rpm, Low = 500 rpm