Table of Contents
Treatment of CMP Waste Streams
Outline
Objective
PPT Slide
Objective
Treatment Strategy
Feasibility Experiments
Electrode Reactions
pH Changes (con’t)
EC/ED of Al2O3
Copper Removal during EC/ED
Copper Distribution
Effect of EDTA and Cu on Al2O3 Particle Charge
Copper Distribution
EC/ED of Concentrated Al2O3 Wastes
Filtration and EC/ED in Tandem
Summary
Cost and Power Consumption
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Author: Brett M. Belongia
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