Cost and Power Consumption

? 1.75V/cm

? 3.50V/cm

? 7.00V/cm

Time (min)

Work (kW·hr/l) ? 10-3

Using $0.05/kW?hr

For 7.0V/cm, 90mins

Cost: $0.014/l

$0.08/wafer

@ 6 l/wafer

For 3.5V/cm, 90mins

Cost: $0.002/l

$0.01/wafer

@ 6 l/wafer

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