Rinse Processes in Semiconductor Manufacturing: From Fundamentals to Optimization *

Research Team:

Dr. Ron Chiarello

Prof. Tom Peterson, UofA

Prof. Farhang Shadman, UofA

Francisco Machuca, Stanford

Renee Mo, Stanford

Karla Romero, UofA

Andy Hebda, UofA

Dan Seif, UofA

R. Parker, HP

Kathy McCormack and Tom Roche, Motorola

Jeff Glick, AMD

* Supported by International Sematech and CEBSM

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