What is an Immersion Wet Bench?(Front-end-of-Line Surface Prep)

HF

SC1

DIW

DIW

SC2

DIW

Overflow

OFDR/QDR

OFDR/QDR

• Robotic automation

• 4 - 7 passes through each wet bench

• Dilute HF, SC1, SC2

• IPA Dryer

• 50, 8 inch diameter wafer

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