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Conductivity Device for Deep Trench Rinse Research
Chemicals may be HF, H2SO4,
H3PO4, etc. (H2SO4 only
with current materials)
Non-corroding/etching
conductive material (highly
doped poly-silicon for
H2SO4 chemistry)
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Single Die:
6390 ?m x 9700 ?m
0.3 cm
5 different
trench lengths
(5,10,20,50,
and 100 mm)
Trenches
500 ?m
480 ?m
20 ?m
20 ?m
0.5 ?m
1000 ?m
500
?m
1000 ?m
20 ?m
3000 ?m
2 ?m
500 ?m
250 ?m
480 ?m
Pad level
20 ?m
5
Rinse
Flow
Die Layout
Circuit Layout
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