Thrust B
Permissible Metal Concentration Levels
Motivations
Cu Deposition Mechanism (I)
Cu Deposition Mechanism (II)
Cu Deposition Mechanism (III)
Cu Nucleation on Ideal H-Si(111)
Cu Nucleation on the Si(100) Defect Sites
Strategy
Systematic Study
Goal
Experimental Parameter
Email: swlim@leland.stanford.edu