Strategy
SR-TXRF
Piero Pianetta
(SSRL)
Cu deposition model
1. Chemical Solution
(pH, redox potential)
2. Thermodynamic driving force
of cupric ion reduction
3. Preferential Cu nucleation
at the kink and defect sites
Takayuki Homma
(Waseda Univ.)
T. Ohmi
RF-PCD
Anand Reddy, Kimerling
(MIT)
TOF-SIMS
J.J. Lee
(Motorola)
Renee Mo
SangWoo Lim
STM, ATR-FTIR
Chris Chidsey (Stanford)
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