Table of Contents
PPT Slide
Slurry for Copper CMP
Cu-CMP Waste Characteristics
Objectives
Techniques Used
Understanding EC/ED
Modeling Electrically - Driven Separations
Simulation Result - 1
Simulation Result - 2
Simulation Result - 3
Simulation Result - 4
Simulation Result - 5
Simulation Result - 6
Simulation Result - 7
Experimental Setup
Copper Removal
Solids Removal
PPT Slide
EDA Characteristics
Electrokinetic Behavior of Al2O3
pH Changes during EC
Electrocoagulation of Al2O3
PPT Slide
Electrocoagulation Tests on 0.4% Al2O3 (with different Fe3+ level)
Electrocoagulation Tests on 0.1% Al2O3 (in both chambers)
PPT Slide
Electrocoagulation Tests on 0.1% Klebosol SiO2 Slurries
PPT Slide
Electrocoagulation Tests on 0.1% Klebosol SiO2 Slurries
Electrocoagulation Tests on 0.4 % Klebosol SiO2 Slurries
PPT Slide
PPT Slide
Electrocoagulation (EC) Tests on Actual CMP Waste Slurry -1
Electrocoagulation (EC) Tests on Actual CMP Waste Slurry-2
Summary
PPT Slide
Acknowledgements
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