Cu-CMP Waste Characteristics

A typical copper CMP

waste contains:

• 0.02 – 0.5 w/v% solids

• 2 – 40ppm copper ions

• An organic complexant?

(e.g. EDA, EDTA, CA)

• A corrosion inhibitor

(e.g. BTA)

CMP Process

Slurry

UPW

CMP Waste Stream

NSF/SRC Engineering Research Center for Environmentally Benign Semiconductor Manufacturing

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