EDA Characteristics
EDA forms a 1:1 or 2:1 complex with Cu2+
The charge of the Cu(EDA) or Cu(EDA)2 complex is positive (2+).
NSF/SRC Engineering Research Center for Environmentally Benign Semiconductor Manufacturing
CH2
CH2
NH2
H2N
+
Cu2+
CH2
CH2
H2N
NH2
Cu 2+
K =10 10.5
CH2
CH2
NH2
H2N
+
Cu2+
CH2
CH2
H2N
NH2
Cu 2+
K =10 19.6
CH2
CH2
NH2
H2N
CH2
CH2
NH2
H2N
or
Previous slide
Next slide
Back to first slide
View graphic version