Electrocoagulation (EC) Tests on Actual CMP Waste Slurry -1
NSF/SRC Engineering Research Center for Environmentally Benign Semiconductor Manufacturing
C/Co
Original Waste Slurry:
pH 6.75
Conductivity: 559 ?S/cm
Solid level: 0.2%
Cu = 10.2 ppm
Cu removal:
Plate out% = ~ 3 %
Total Removal = ~ 90%
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