Electrocoagulation (EC) Tests on Actual CMP Waste Slurry-2

NSF/SRC Engineering Research Center for Environmentally Benign Semiconductor Manufacturing

C/Co

Original waste slurry:

pH = 3.6

Conductivity: 388 ?S/cm

Solid level: ~ 0.1%

Cu = 0.5 ppm

Slurry in

Cathode

Chamber

Cu removal:

Plate out% = ~ 40 %

Total Removal = ~ 50%

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