PPT Slide
NSF/SRC Engineering Research Center for Environmentally Benign Semiconductor Manufacturing
5. Klebosol SiO2 in cathode chamber appears to coagulate by the presence of ferric iron that migrate from the anode chamber.
6. When either 0.4% or 0.1% SiO2 is contained in the anode chamber, no coagulation is observed, this indicates that “IEP” mechanism can not be used to explain SiO2 coagulation, a new explanation needs to be found.