Point-of-Use Plasma Abatement of PFC’s and HFC’s

1/21/99


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Table of Contents

Point-of-Use Plasma Abatement of PFC’s and HFC’s

Acknowledgements

PPT Slide

Outline

PFC Emissions Reduction

PFC Emissions Reduction Strategies

Plasma Abatement of PFC’s

Advantages of POU Plasma Abatement

Industrial/Academic Interactions

In-fab Beta test

Litmas "Blue" POU ICP Abatement System

Beta test configuration

O2-based Abatement of a Typical Etch Recipe

O2-based abatement of Etch Exhaust

O2-Based Abatement of Etch Exhaust

H2O-based Abatement of a Typical Etch Recipe

H2O-based Abatement of PFC’s

H2O-based Abatement of PFC’s

Overall reduction in Global Warming Emissions

Beta test conclusions

Mechanistic Studies

PPT Slide

PPT Slide

PPT Slide

Modeling POU Plasma Abatement

Modeling POU Plasma Abatement

Modeling POU Plasma Abatement

PPT Slide

Comparison of PFC Emissions Reduction Technologies

POU Abatement Economics

Author: Eric J. Tonnis

Email: tonnis@condor.cchem.berkeley.edu