Point-of-Use Plasma Abatement of PFC’s and HFC’s
Acknowledgements
PPT Slide
Outline
PFC Emissions Reduction
PFC Emissions Reduction Strategies
Plasma Abatement of PFC’s
Advantages of POU Plasma Abatement
Industrial/Academic Interactions
In-fab Beta test
Litmas "Blue" POU ICP Abatement System
Beta test configuration
O2-based Abatement of a Typical Etch Recipe
O2-based abatement of Etch Exhaust
O2-Based Abatement of Etch Exhaust
H2O-based Abatement of a Typical Etch Recipe
H2O-based Abatement of PFC’s
Overall reduction in Global Warming Emissions
Beta test conclusions
Mechanistic Studies
Modeling POU Plasma Abatement
Comparison of PFC Emissions Reduction Technologies
POU Abatement Economics
Email: tonnis@condor.cchem.berkeley.edu