PPT Slide

p165d

Reuse and Recycle

Chemicals recycle and reuse

Water recycle and reuse

Abatement and

Discharge Control

Novel plasma reactor abatement

Waste water treatment

CMP waste treatment

Time Line

Deliverable

Major

Deliverable

Testbed

Use Reduction

Low chemical surface prep

Low-water rinse processes

Low-energy UPW processes

CMP waste reduction

Strategic Plan

11

12

13

14

16

17

18

19

21

23

22

24

25

15

20

New Chemistries

and Processes

New plasma processes

New etch/clean chemistries

New water purification processes

New patterning processes

1

2

3

4

5

1

2

4

5

6

9

Thrust B

Thrust A

Thrust C

Thrust D

Previous slide

Next slide

Back to first slide

View graphic version