Beta test conclusions
- Litmas abatement device is effective for destruction of PFC’s and HFC’s from a “typical” etch process.
- > 95% reduction in global warming emissions (power corrected)
- H2O and O2 are effective additives for PFC destruction.
- H2O is safer to handle and less expensive.
- H2O abatement does not produce COF2 (Toxic), NO2 (HAP), or F2
- Abatement performance is relatively insensitive to input loading over tested range.
- Input power appears to be key parameter (dissociation limited?)
- No negative processing effects were observed.
- Unresolved Issues: Foreline degradation, pressure limitations, particulate formation, pump reliability effects, higher flows?