PPT Slide

Appearance Mass Spectrometry

Ar Ar+

• Detection of radicals and

stable neutrals.

• Measure absolute number

density of species.

• Signal = a n s Ie

• Species detected :

CF4, H2O, CO2, CO, O2, H2, HF, COF2.

• Radicals :

H, O, OH, F, CFx, HOF, COF.

Previous slide

Next slide

Back to first slide

View graphic version