Modeling POU Plasma Abatement
Develop a 2-D model of neutral reactions and transport in POU plasma abatement. Couple this to a 2-D plasma model which treats electrons and ions.
Fundamental mechanisms for plasma abatement are not well known and therefore, extension of this technique to other conditions and applications is difficult. (and expensive)
- Residence time effects
- Chemistry change effects
- Neutral gas temperature effects… is pyrolysis important?