PPT Slide
Misra et al: Observations/Conclusions
- Hydrophobic wafer (no rinse) = much cleaner (~5x108 Ca/cm2)
- Ca surface conc. linearly proportional to solution conc.
(log-log plot) on hydrophilic wafer
- DI water rinse does contribute to initial Ca conc. on
- No time dependence on surface Ca conc. in static bath
- Strong pH dependence on surface Ca conc.
lower pH -> lower surface Ca
- Possibility of Ca clustering on surface