PPT Slide
Lowenstein et al. -- Summary
- Surface hydroxyl group the most likely site for metal cation adsorption
- Langmuir adsorption model provides adequate explanation to
equilibrium metal ion adsorption behaviors
- Surface adsorption site density ?0 ~1012 /cm2 on wet chemical oxide
- Time dependence: negligible for most metals … (equilibrium cond.)
except for Cr3+, Fe3+, Al3+ at high pH (OH- complexing effect)
- Competitive adsorption in acidic [H+] or basic [NH4+] environment
lowers the risk of metal ion adsorption on hydrophilic Si surfaces.
- Optimized rinse process does NOT automatically result from low