PPT Slide

Si sub

TiSix (WSix,CoSix …)

ILO (TEOS/SiO2)

BPSG

Typical CMOS Transistor

Flow Thin Film Stack

gate oxide

(3-10nmSiO2)

poly-Si

Dynamic SIMS Application: On-chip Select Area Depth Profiling

Ca: 2E10 at/cm2

<- B: 6E12 at/cm2

silicide/poly/gox

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