CO2 Applications in Semiconductor Industry
Overview
Advantages of CO2
Current CO2 Applications
Supercritical Carbon Dioxide (SCCO2)
Dry Ice Blasting
CO2 Snow Jet
Supercritical CO2 (SCCO2)
Environmental Issues of CO2
Issues With CO2 In The Fab
Need for Efficient Industry Transfer
Email: conrad.sorenson@praxair.com