CO2 Applications in Semiconductor Industry

6/16/99


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Table of Contents

CO2 Applications in Semiconductor Industry

Overview

Advantages of CO2

Current CO2 Applications

Supercritical Carbon Dioxide (SCCO2)

Dry Ice Blasting

CO2 Snow Jet

Supercritical CO2 (SCCO2)

Environmental Issues of CO2

Issues With CO2 In The Fab

Need for Efficient Industry Transfer

Author: Praxair, Inc.

Email: conrad.sorenson@praxair.com