Current CO2 Applications
Dry ice blasting for
- Semiconductor process tool parts cleaning
CO2 snow jet for
- Semiconductor process tool parts cleaning
- Wafer cleaning (e.g., veil removal, etc.)
Supercritical CO2 (SCCO2) or dense phase CO2 for
- Wafer cleaning (photoresist stripping)
- Wafer drying
- Advanced photoresist applications